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Combinatorial Synthesis Approach for Optimizing Oxide/Si Interfaces for the Future ULSI

Author(s):
Chikyow, T.
Ahmet, P.
Naruke, T.
Nakajima, K.
Okazaki, N.
Hasegawa, K.
Minami, H.
Itaka, K.
Koida, T.
Song, J.H.
Yoshimoto, M.
Hasegawa, T.
Kawasaki, M.
Koinuma, H.
9 more
Publication title:
Combinatorial and artificial intelligence methods in materials science : symposium held November 26-29, 2001, Boston, Massachusetts, U.S.A
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
700
Pub. date:
2002
Page(from):
85
Page(to):
96
Pages:
12
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558996366 [1558996362]
Language:
English
Call no.:
M23500/700
Type:
Conference Proceedings

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