Improvement of Characteristics in Highly Reliable Thin Film Diode With Anodic Tantalum Pentoxide by Low Temperature Annealing Conditions

Improvement of Characteristics in Highly Reliable Thin Film Diode With Anodic Tantalum Pentoxide by Low Temperature Annealing Conditions

Author(s):

Lee, Chan-Jae

Publication title:

Electrically based microstructural characterization III : symposium held November 26-29, 2001, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

699

Pub. Year:

2002

Page(from):

191

Page(to):

196

Pages:

6

Pub. info.:

Warrendale, PA: Materials Research Society

ISSN:

02729172

ISBN:

9781558996359 [1558996354]

Language:

English

Call no.:

M23500/699

Type:

Conference Proceedings

Details

TDL ID:	ZA00014574
Series ID:	PA00000011
Conf. info. (Name):	Symposium on electrically based microstructural characterization
Conf. info. (Number):	3rd
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	2001.11.26-2001.11.29

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