Physical Properties and Diffusion Characteristics of CVD-Grown TiSiN Films

Physical Properties and Diffusion Characteristics of CVD-Grown TiSiN Films

Author(s):

Publication title:

Surface engineering 2001 - fundamentals and applications : symposium held November 26-29, 2001, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

697

Pub. Year:

2002

Page(from):

341

Page(to):

346

Pages:

6

Pub. info.:

Warrendale, Penn: Materials Research Society

ISSN:

02729172

ISBN:

9781558996335 [1558996338]

Language:

English

Call no.:

M23500/697

Type:

Conference Proceedings

Details

TDL ID:	ZA00014572
Series ID:	PA00000011
Conf. info. (Name):	Symposium on surface engineering
Conf. info. (Number):	2001
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	2001.11.26-2001.11.29

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