Adsorption-Induced Failure Modes of Thin-Film Resonators
- Author(s):
- Publication title:
- Thin films : stresses and mechanical properties IX : symposium held November 26-30, 2001, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 695
- Pub. Year:
- 2002
- Page(from):
- 365
- Page(to):
- 370
- Pages:
- 6
- Pub. info.:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558996311 [1558996311]
- Language:
- English
- Call no.:
- M23500/695
- Type:
- Conference Proceedings
Similar Items:
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
ESA Communications |
SPIE - The International Society for Optical Engineering |
Materials Research Society |
SPIE-The International Society for Optical Engineering |
10
Conference Proceedings
A mechanistic model tor adsorption-induced change in resonance response of submicron cantilevers
Society of Photo-optical Instrumentation Engineers |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
6
Conference Proceedings
Stress analysis for the optimization of a new plastic package for optical sensors
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |