Low Temperature Preparation of High-Quality Pb(Zr,Ti)O3 Films by Metal Organic Chemical Vapor Deposition With High Reproducibility

Low Temperature Preparation of High-Quality Pb(Zr,Ti)O3 Films by Metal Organic Chemical Vapor Deposition With High Reproducibility

Author(s):

Funakubo, Hiroshi

Publication title:

Ferroelectric Thin Films X : symposium held November 25-29, 2001, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

688

Pub. Year:

2002

Page(from):

3

Page(to):

14

Pages:

12

Pub. info.:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558996243 [1558996249]

Language:

English

Call no.:

M23500/688

Type:

Conference Proceedings

Details

TDL ID:	ZA00014564
Series ID:	PA00000011
Conf. info. (Name):	Symposium on ferroelectric thin films
Conf. info. (Number):	10th
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	2001.11.25-2001.11.29

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