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Charge Transport in Low Stress Si-rich Silicon Nitride Thin Films

Author(s):
Publication title:
Materials science of microelectromechanical systems (MEMS) devices IV : symposium held November 25-28, 2001, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
687
Pub. date:
2002
Page(from):
107
Page(to):
112
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558996236 [1558996230]
Language:
English
Call no.:
M23500/687
Type:
Conference Proceedings

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