Surface Roughness Control of the Al and Al2O3 Thin Films Deposited by Using Pulsed DC Magnetron Sputtering

Surface Roughness Control of the Al and Al2O3 Thin Films Deposited by Using Pulsed DC Magnetron Sputtering

Author(s):

Publication title:

Mechanisms of surface and microstructure evolution in deposited films and film structures : symposium held April 17-20, 2001, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

672

Pub. Year:

2001

Pages:

6

Pub. info.:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558996083 [1558996087]

Language:

English

Call no.:

M23500/672

Type:

Conference Proceedings

Details

TDL ID:	ZA00014555
Series ID:	PA00000011
Conf. info. (Name):	Symposium On Mechansims of Surface and Microstructure Evolution in Deposited Films and Film Structures
Conf. info. (Number):	2001
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	2001.04.17-2001.04.20

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