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Carbon Diffusion and Clustering in SiGeC Layers Under Thermal Oxidation

Author(s):
Salvador, D. De
Napolitani, E.
Coati, A.
Berti, M.
Drigo, A.V.
Carroll, M.
Sturm, J.C.
Stangl, J.
Bauer, G.
Lazzarini, L.
5 more
Publication title:
Si front-end processing -- physics and technology of dopant-defect interactions III : symposium held April 17-19, 2001, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
669
Pub. Year:
2001
Pages:
6
Pub. info.:
Warrendale, PA: Materials Research Society
ISSN:
02729172
ISBN:
9781558996052 [1558996052]
Language:
English
Call no.:
M23500/669
Type:
Conference Proceedings

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