Blank Cover Image

Identification of Growth Precursors In Hot Wire CVD of Amorphous Silicon Films

Author(s):
Publication title:
Amorphous and heterogeneous silicon-based films - 2001 : symposium held April 16-20, 2001, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
664
Pub. Year:
2001
Pages:
6
Pub. info.:
Warrendale: Materials Research Society
ISSN:
02729172
ISBN:
9781558996007 [1558996001]
Language:
English
Call no.:
M23500/664
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Effect of Filament Material on the Decomposition of SiH4 in Hot Wire CVD of Si-Based Films

Duan, H. L., Zaharias, G.A., Bent, Stacey F.

Materials Research Society
7 Conference Proceedings Fast Deposition of Polycrystalline Silicon Films by Hot-Wire CVD

Middya, A. R., Lloret, A., Perrin, J., Huc, J., Moncel, J. L., Parey, J. Y., Rose, G.

MRS - Materials Research Society
2 Conference Proceedings Hot Wire Chemical Vapor Deposition as a Novel Synthetic Method for Electroactive Organic Thin Films

Zaharias, Gillian A., Shi, Helen H., Bent, Stacey F.

Materials Research Society
8 Conference Proceedings Performances of Nano/Amorphous Silicon Films Produced by Hot Wire Plasma Assisted Technique

Ferreira, I., Aguas, H., Mendes, L., Fernandes, F., Fortunato, E., Martins, R.

MRS - Materials Research Society
3 Conference Proceedings Microcrystalline Silicon For Solar Cells At High Deposition Rates By Hot Wire CVD

Schropp, R.E.I., Xu, Y., Iwaniczko, E., Zaharias, G.A., Mahan, A.H.

Materials Research Society
9 Conference Proceedings Hot-Wire Deposited Amorphous Silicon Thin-Film Transistors

Schropp, R. E. I., Feenstra, K. F., Werf, C. H. M. van der, Holleman, J., Meiling, H.

MRS - Materials Research Society
4 Conference Proceedings The Use Of Seed Layers In Hot Wire Chemical Vapor Deposition Of Microcrystalline Silicon Films

Zaharias, G.A., Mahan, A.H., Schropp, R.E.I., Xu, Y., Williamson, D.L., Al-Jassim, M.M., Romero, M.J., Gedvilas, L.M.

Materials Research Society
10 Conference Proceedings Hot-Wire Deposited Amorphous Silicon Thin-Film Transistors

Schropp, R. E. I., Feenstra, K. F., Werf, C. H. M. van der, Holleman, J., Meiling, H.

MRS - Materials Research Society
5 Conference Proceedings Solid Phase Crystallization of Hot-Wire CVD Amorphous Silicon Films

Young, David L., Stradins, Paul, Iwaniczko, Eugene, To, Bobby, Reedy, Bob, Yan, Yanfa, Branz, Howard M., Lohr, John, …

Materials Research Society
11 Conference Proceedings (809a) Investigation of Growth Mechanisms in Molecular Layer Deposition of Polymer Films

David Bergsman, Han Zhou, Stacey F. Bent

American Institute of Chemical Engineers
6 Conference Proceedings Hot-Wire CVD Poly-Silicon Films for Thin-Film Devices

Rath, J. K., Tichelaar, F. D., Meiling, H., Schropp, R. E. I.

MRS - Materials Research Society
12 Conference Proceedings Amorphous To Microcrystalline Transition In Thickness-Graded Hot-Wire Cvd Silicon Films

Wang, Qi, Perkins, John, Moutinho, Helio, To, Bobby, Branz, Howard M.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12