Blank Cover Image

MEMS Materials and Fabrication Technology on Large Areas: The Example of an X-ray Imager

Author(s):
Daniel, J.H.
Krusor, B.
Lau, R.
Lu, J.P.
Wang, Y.
Mulato, M.
Apte, R.B.
Street, R.A.
Goredema, A.
Boils-Boissier, D.C.
Silver, S.E.
Kazmaier, P.M.
7 more
Publication title:
Materials science of microelectromechanical systems (MEMS) devices III : symposium held November 27-28, 2000, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
657
Pub. Year:
2001
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558995673 [1558995676]
Language:
English
Call no.:
M23500/657
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Large-area MEMS fabrication with thick SU-8 photoresist applied to an x-ray image sensor array

Daniel,J.H., Krusor,B.S., Apte,R.B., Street,R.A., Goredema,A., McCalium,J., Boils-Boissier,D.C., Kazmaier,P.M.

SPIE-The International Society for Optical Engineering
7 Conference Proceedings Large-area x-ray image sensing using a Pbl2 photoconductor

Street,R.A., Shah,K.S., Ready,S.E., Apte,R.B., Bennett,P.R., Klugerman,M., Dmitriyev,Yu.

SPIE-The International Society for Optical Engineering
2 Conference Proceedings Amorphous Silicon Backplane With Polymer MEMS Structures for Electrophoretic Displays

Daniel, J.H., Krusor, B.S., Chopra, N., Street, R.A., Kazmaier, P.M., Ready, S.E., Ho, J.H.

Materials Research Society
8 Conference Proceedings Two-Dimensional Amorphous Silicon Color Sensor Array

Lemmi, F., Mulato, M., Ho, J., Lau, R., Lu, J.P., Street, R.A.

Materials Research Society
3 Conference Proceedings Matrix-addressed x-ray detector arrays

Street,R.A., Apte,R.B., Boyce,J.B., Ho,J., Lau,R., Lemmi,F., Lu,J.-P., Mulato,M., Ready,S.E., Schuylenbergh,K.Van

SPIE-The International Society for Optical Engineering
9 Conference Proceedings Charge collection and capacitance in continuous-film flat-panel detectors

Mulato,M., Lemmi,F., Lau,R., Lu,J.P., Ho,J., Ready,S.E., Rahn,J.T., Street,R.A.

SPIE - The International Society for Optical Engineering
4 Conference Proceedings Mechanisms of Cross-Talk in Large Area a-Si:H Continuous Image Sensors

Mulato, M., Lu, J.P., Ready, S.E., Schuylenbergh, K. Van, Ho, J., Lau, R., Boyce, J.B., Street, R.A.

Materials Research Society
10 Conference Proceedings Photoconductivity of Pentacene Thin Film Transistors

Knipp, D., Murti, D.K., Krusor, B., Apte, R., Jiang, L., Lu, J.P., Ong, B.S., Street, R.A.

Materials Research Society
5 Conference Proceedings Influence of the Dielectric on the Growth and Performance of Pentacene Thin Film Transistors

Knipp, D., Street, R.A., Krusor, B., Ho, J., Apte, R.B.

Materials Research Society
11 Conference Proceedings Large-area low-noise amorphous silicon imaging system

Apte,R.B., Street,R.A., Ready,S.E., Jared,D.A., Moore,A.M., Weisfield,R.L., Rodericks,T.A., Granberg,T.A.

SPIE-The International Society for Optical Engineering
6 Conference Proceedings Influence of the gate dielectric on the morphological and electronic structure of pentacene films for transistor applications

Knipp,D., Street,R.A., Krusor,B.S., Apte,R.B., Ho,J.

SPIE-The International Society for Optical Engineering
12 Conference Proceedings Achieving high-resolution in flat-panel imagers for digital radiography

Rahn,J.T., Lemmi,F., Lu,J.-P., Mei,P., Street,R.A., Ready,S.E., Ho,J., Apte,R.B., Schuylenbergh,K.Van, Lau,R., …

SPIE - The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12