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Al Doped Ta2O5 Thin Films for Microelectronic Applications

Author(s):
Publication title:
Structure-property relationships of Oxide surfaces and interfaces : symposium held November 27-29, 2000, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
654
Pub. Year:
2001
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558995642 [1558995641]
Language:
English
Call no.:
M23500/654
Type:
Conference Proceedings

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