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Low Temperature Tungsten, Tungsten Carbide, and Tantalum Carbide Film Growth

Author(s):
Sun, Y.-M.
Lee, S.Y.
Engbrecht, E.R.
Pfeifer, K.
Smith, S.
White, J.M.
Ekerdt, J.G.
2 more
Publication title:
Growth, evolution and properties of surfaces, thin films and self-organized structures : symposium held November 27-December 1, 2000, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
648
Pub. Year:
2001
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558995581 [1558995587]
Language:
English
Call no.:
M23500/648
Type:
Conference Proceedings

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