Blank Cover Image

Growth of AlN and TiN Structures by Plasma-Enhanced Pulsed Laser Deposition

Author(s):
Publication title:
Growth, evolution and properties of surfaces, thin films and self-organized structures : symposium held November 27-December 1, 2000, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
648
Pub. Year:
2001
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558995581 [1558995587]
Language:
English
Call no.:
M23500/648
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Growth of TiN/AlN Superlattice by Pulsed Laser Deposition

Wang, H., Gupta, A., Tiwari, Ashutosh, Zhang, X., Narayan, J.

Materials Research Society
7 Conference Proceedings TiN/AlN Nano Multilayers Film Fabricated by Plasma Enhanced Atomic Layer Deposition

Y. Jia, R.G. Tang, W.E. Lu, Y.T. Fang, Y. Xia

Trans Tech Publications
2 Conference Proceedings Surface and microstructural characterization of homoepitaxial silicon grown by pulsed laser deposition

Pelt, J. S., Magana, R.Jr., Ramsey, M. E., Poindexter, E., Atwell, S., Zheng, J. P., Durbin, S. M., Kobayashi, M.

MRS-Materials Research Society
8 Conference Proceedings Pulsed-laser-deposited coatings for stiction and wear reduction in MEMS devices

Pelt,J.S., Ramsey,M.E., Magana,R.,Jr., Poindexter,E.,Jr., Boer,M.P.de, LaVan,D.A., Dugger,M.T., Smith,J.H., Durbin,S.M.

SPIE - The International Society for Optical Engineering
3 Conference Proceedings Influence of the Growth Atmosphere on the Properties of AlN Grown by Plasma-Assisted Pulsed Laser Deposition

Ogawa, T., Okamoto, M., Mori, Y., Sasaki, T.

MRS - Materials Research Society
9 Conference Proceedings EPITAXIAL GROWTH OF TiN ON GaAs(100) BY PULSED LASER DEPOSITION

Zheleva, Tsvetanka S., Jagannadham, K., Kumar, A., Narayan, J.

Materials Research Society
4 Conference Proceedings Ca2RuO4 Thin Film Growth by Pulsed Laser Deposition

Wang, Xu, Xin, Yan, Lee, Hanoh, Stampe, Patricia A., Kennedy, Robin J., Zhou, Zhixian, Zheng, Jim P.

Materials Research Society
10 Conference Proceedings Wurtzite structure high Mg content ZnMgO thin films deposited by oxygen-plasma enhanced pulsed laser deposition

Y. Gu, X. Li, J. F. Kong, C. Yang, W. Z. Shen

Society of Photo-optical Instrumentation Engineers
5 Conference Proceedings Carbon Nanotubes and Nanofibers Grown by Microwave Plasma Enhanced Chemical Vapor Deposition on a Nickel Substrate

Belay, K. G., Jackson, J., Xin, Yan

Materials Research Society
11 Conference Proceedings Surface Dynamics of GaAs Thin Film Formation by Pulsed Laser Deposition Investigated Using RHEED

Pun, A., Durbin, S.M., Kennedy, J., Markwitz, A., Reeves, R., Zheng, J.P.

Materials Research Society
6 Conference Proceedings Epitaxial Growth of AlN Thin Films on Silicon and Sapphire by Pulsed Laser Deposition

Vispute, R. D., Wu, H., Jagannadham, K., Narayan, J.

MRS - Materials Research Society
12 Conference Proceedings Pulsed laser deposition of multilayered structures

M. Jelęnek, V. Olšan, V. Trtęk

Society of Photo-optical Instrumentation Engineers
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12