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Studies of Silicon Oxynitride Films Produced by Radio-Frequency Plasma Assisted Electron Cyclotron Resonance

Author(s):
Publication title:
Growth, evolution and properties of surfaces, thin films and self-organized structures : symposium held November 27-December 1, 2000, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
648
Pub. Year:
2001
Pages:
8
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558995581 [1558995587]
Language:
English
Call no.:
M23500/648
Type:
Conference Proceedings

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