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Effects of ArF Excimer Irradiation on Multi-Energy Ge and Se Ion Implanted Silica

Author(s):
Magruder, R.H., III
Zuhr, R.A.
Weller, R.A.
Weeks, R.A.
Wehrmeyer, J.
Hensley, D.K.
1 more
Publication title:
Ion beam synthesis and processing of advanced materials : symposium held November 27-29, 2000, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
647
Pub. Year:
2001
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558995574 [1558995579]
Language:
English
Call no.:
M23500/647
Type:
Conference Proceedings

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