Growth of Thick 4H-SiC Epilayers in a Vertical Radiant-Heating Reactor

Growth of Thick 4H-SiC Epilayers in a Vertical Radiant-Heating Reactor

Author(s):

Publication title:

Silicon carbide--materials, processing and devices : symposium held November 27-29, 2000, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

640

Pub. Year:

2001

Pages:

6

Pub. info.:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558995505 [1558995501]

Language:

English

Call no.:

M23500/640

Type:

Conference Proceedings

Details

TDL ID:	ZA00014527
Series ID:	PA00000011
Conf. info. (Name):	Symposium on silicon carbide-materials
Conf. info. (Number):	2000
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	2000.11.27-2000.11.29

Similar Items:

1 Conference Proceedings Growth and Electrical Characterization of the Lightly-Doped Thick 4H-SiC Epilayers Tsuchida, H., Kamata, I., Jikimoto, T., Izumi, K. Trans Tech Publications	7 Conference Proceedings 4H-SiC Epitaxial Growth for High-Power Devices Tsuchida, H., Kamata, I., Jikimoto, T., Miyanagi, T., Izumi, K. Trans Tech Publications
2 Conference Proceedings Growth and Electrical Characterization of the Lightly-Doped Thick 4H-SiC Epilayers Tsuchida, H., Kamata, I., Jikimoto, T., Izumi, K. Trans Tech Publications	8 Conference Proceedings Conditions for Micropipe Dissociation by 4H-SiC CVD Growth Kamata, I., Tsuchida, H., Jikimoto, T., Miyanagi, T., Izumi, K. Trans Tech Publications
3 Conference Proceedings Micropipe Closing via Thick 4H-SiC Epitaxial Growth Involving Structural Transformation of Screw Dislocations Kamata, I., Tsuchida, H., Jikimoto, T., Izumi, K. Trans Tech Publications	9 Conference Proceedings In Situ Analysis of Thermal Oxidation on H-Terminated 4H-SiC Surfaces Jikimoto, T., Tsuchida, H., Kamata, I., Izumi, K. Trans Tech Publications
4 Conference Proceedings A Comparative Study of the Electrical Properties of 4H-SiC Epilayers with Continuous and Dissociated Micropipes Kamata, I., Tsuchida, H., Jikimoto, T., Izumi, K. Trans Tech Publications	10 Conference Proceedings In Situ Analysis of Thermal Oxidation on H-Terminated 4H-SiC Surfaces Jikimoto, T., Tsuchida, H., Kamata, I., Izumi, K. Trans Tech Publications
5 Conference Proceedings A Comparative Study of the Electrical Properties of 4H-SiC Epilayers with Continuous and Dissociated Micropipes Kamata, I., Tsuchida, H., Jikimoto, T., Izumi, K. Trans Tech Publications	11 Conference Proceedings Homoepitaxial Growth and Characterization of Thick SiC Layers With a Reduced Micropipe Density Tsuchida, H., Kamata, I., Izumi, S., Tawara, T., Jikimoto, T., Miyanagi, T., Nakamura, T., Izumi, K. Materials Research Society
6 Conference Proceedings LPCVD Growth and Structural Properties of 4H-SiC Epitaxial Layers Tsuchida, H., Kamata, I., Jikimoto, T., Izumi, K. Trans Tech Publications	12 Conference Proceedings Evaluation of Free Carrier Lifetime and Deep Levels of the Thick 4H-SiC Epilayers Tawara, T., Tsuchida, H., Izumi, S., Kamata, I., Izumi, K. Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12