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Structural Characterization of SiC Epitaxial Layers Grown on Porous SiC Substrates

Author(s):
Saddow, S.E.
Melnychuk, G.
Mynbaeva, M.
Nikitina, I.
Vetter, W.M.
Jin, L.
Dudley, M.
Shamsuzzoha, M.
Dmitriev, V.
Wood, C.E.C
5 more
Publication title:
Silicon carbide--materials, processing and devices : symposium held November 27-29, 2000, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
640
Pub. date:
2001
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558995505 [1558995501]
Language:
English
Call no.:
M23500/640
Type:
Conference Proceedings

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