Blank Cover Image

Effect of N2 Plasma Treatments on Dry Etch Damage in n- and p-type GaN

Author(s):
Kent, D. G.
Lee, K.P.
Zhang, A. P.
Luo, B.
Overberg, M.E.
Abernathy, C. R.
Ren, F.
Mackenzie, K. D.
Pearton, S.J.
Nakagawa, Y.
5 more
Publication title:
GaN and related alloys - 2000 : symposium held November 27-December 1, 2000, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
639
Pub. date:
2001
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558995499 [1558995498]
Language:
English
Call no.:
M23500/639
Type:
Conference Proceedings

Similar Items:

Shul, Randy J., Zhang, L., Baca, A.G., Willison, Christi G., Hans, J., Pearton, S.J., Lee, K.P., Ren, F.

Materials Research Society

Ren, F., Lothian, J. R., Chen, Y. K., MacKenzie, J. D., Donovan, S. M., Abernathy, C. R., Vartuli, C. B., Lee, J. W., …

MRS - Materials Research Society

Kim, J., Luo, B., Mehandru, R., Ren, F., Lee, K.P., Pearton, S.J., Polyakov, A.Y., Smirnov, N.B., Govorkov, A.V., …

Materials Research Society

Kim, J., Gila, B.P., Mehandnj, R., Johnson, J.W., Shin, J.H., Lee, K.P., Luo, B., Onstine, A., Abernathy, C.R., Pearton, …

Electrochemical Society

3 Conference Proceedings Dry Etch Damage in InN, InGaN and InAlN

Pearton, S. J., Lee, J. W., MacKenzie, J. D., Vartuli, C. B., Donovan, S. M., Abernathy, C. R., Shul, R. J., Ren, F., …

MRS - Materials Research Society

Pearton, S. J., Vartuli, C. B., Lee, J. W., Donovan, S. M., MacKenzie, J. D., Abernathy, C. R., Shul, R. J., McLane, G. …

MRS - Materials Research Society

Overberg, M., Brand, J., MacKenzie, J.D., Abernathy, C.R., Pearton, S.J.

Electrochemical Society

Lee, K.P., Zhang, A. P., Dang, G., Ren, F., Han, J., Chu, S. N. G., Hobson, W. S., Lopata, J., Abernathy, C. R., …

Materials Research Society

Lee, K.-N., Donovan, S.M., Gila, B., Overberg, M., Mackenzie, J.D., Abernathy, C.R.

Electrochemical Society

Pearton, S.J., Ren, F., Katz, A., Chakrabarti, U.K., Lane, E., Hobson, W.S., Kopf, R.F., Abernathy, C.R., Wu, C.S., …

Materials Research Society

Lee, J. W., Hong, J., MacKenzie, J. D., Abernathy, C. R., Pearton, S. J., Ren, F., Sciortino, P. F., Jr.

MRS - Materials Research Society

12 Conference Proceedings GaN Power Devices

Pearton, S.J., Ren, F., Zhang, A.P., Dang, G., Cac, X.A., Lee, K.P., Cho, H., Gila, B.P., Johnson, J.W., Monier, C., …

Electrochemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12