Highly Selective Photoenhanced Wet Etching of GaN for Defect Investigation and Device Fabrication
- Author(s):
Visconti, P. Reshchikov, M.A. Jones, K.M. Yun, F. Wang, D. F. Cingolani, R. Morkoc, H. Litton, C. W. Molnar, R. J. - Publication title:
- GaN and related alloys - 2000 : symposium held November 27-December 1, 2000, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 639
- Pub. Year:
- 2001
- Pages:
- 6
- Pub. info.:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558995499 [1558995498]
- Language:
- English
- Call no.:
- M23500/639
- Type:
- Conference Proceedings
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