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Precise Characterization of Resists and Thin Gate Dielectrics in the VUV Range for 157nm Lithography

Author(s):
Publication title:
Nonlithographic and lithographic methods of nanofabrication--from ultralarge-scale integration to photonics to molecular electronics : symposium held November 26-December 1, 2000, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
636
Pub. Year:
2001
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558995468 [1558995463]
Language:
English
Call no.:
M23500/636
Type:
Conference Proceedings

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