Effect of Corrosion Inhibitor (BTA) in Citric Acid Based Slurry on Cu CMP
- Author(s):
- Publication title:
- Chemical-mechanical planarization - integration technology and realiability : symposium held March 28-31, 2005, San Francisco, California, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 867
- Pub. Year:
- 2005
- Page(from):
- 3
- Page(to):
- 8
- Pages:
- 6
- Pub. info.:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558998209 [1558998209]
- Language:
- English
- Call no.:
- M23500/867
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
The Adsorption Behaviors of Citric Acid on Abrasive Particles in Cu CMP Slurry
Materials Research Society |
7
Conference Proceedings
EFFECT OF CORROSION INHIBITOR, lH-BENZOTRJAZOLE (BTAH) ON PARTICLE ADHESION IN Cu CMP
Electrochemical Society |
Materials Research Society |
Materials Research Society |
Materials Research Society |
Electrochemical Society |
4
Conference Proceedings
Frictional Behavior and Particle Adhesion of Abrasive Particles during Cu CMP
Materials Research Society |
10
Conference Proceedings
Electrochemical and Frictional Behaviors of Cu Surface in Organic Acid Based Slurries During Copper CMP
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
Materials Research Society |
Materials Research Society |