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Thermal Transformation of Hydrogen Bonds in a-SiC:H Films: Structural and Optical Properties

Author(s):
Vasin, Andrey V.
Kolesnik, Sergey P.
Konchits, Andrey A.
Lysenko, Vladimir S.
Nazarov, Alexey N.
Rusavsky, Andrey V.
Ashok, S.
2 more
Publication title:
Semiconductor defect engineering - materials, synthetic structures and devices : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
864
Pub. date:
2005
Page(from):
527
Page(to):
532
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558998179 [1558998179]
Language:
English
Call no.:
M23500/864
Type:
Conference Proceedings

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