Blank Cover Image

Void Formation in Hydrogen Implanted and Subsequently Plasma Hydrogenated and Annealed Czochralski Silicon

Author(s):
Publication title:
Semiconductor defect engineering - materials, synthetic structures and devices : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
864
Pub. Year:
2005
Page(from):
487
Page(to):
492
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558998179 [1558998179]
Language:
English
Call no.:
M23500/864
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings μ-Raman Spectra Analysis of the Evolution of Hydrogen Related Defects and Void Formation in the Silicon Ion-Cut Process

Dungen, W., Job, R., Ma, Y., Huang, Y.L., Fahrner, W.R., Keller, L.O., Horstmann, J.T.

Materials Research Society
7 Conference Proceedings On the Formation Kinetics of Thin Nanopatterned Layers on Silicon Wafers Created by Hydrogen Plasma Exposure

Job, R., Huang, Y. L., Ma, Y., Zolgert, B., Dungen, W.

Materials Research Society
2 Conference Proceedings Hydrogen Gettering and Platelet Formation in Implanted and Hydrogenated Silicon

A. Job, W. Düngen, Y. Ma, W. R. Fahrner, L. O. Keller, J. T. Horstmann, H. Fiedler

Electrochemical Society
8 Conference Proceedings Hydrogen Diffusion Characterized by Hydrogen Enhanced Thermal Donor Formation in p-Type Czochralski Silicon at Temperatures Between 350 and 450℃

Huang, Y.L., Ma, Y., Job, R., Fahmer, W.R.

Electrochemical Society
3 Conference Proceedings P-N Junction Diodes Fabricated Based on Donor Formation in Plasma Hydrogenated P-Type Czochralski Silicon

Huang, Y.L., Simoen, E., Job, R., Claeys, C., Dungen, W., Ma, Y., Fahrner, W.R., Versluys, J., Clauws, P.

Materials Research Society
9 Conference Proceedings Formation and Annihilation of Hydrogen Related Donor States in Proton Implanted and Subsequently Plasma Hydrogenated N-Type Float Zone Silicon

R. Job, F. Niedernostheide, H. Schulze

Electrochemical Society
4 Conference Proceedings Micro-Raman Analysis of Hydrogen Related Defects in Czochralski Silicon (Invited)

Job, R., Dungen, W., Ma, Y., Huang, Y. L.

Electrochemical Society
10 Conference Proceedings Oxygen Gettering and Thermal Donor Formation at Postimplantation Annealing of Hydrogen-Implanted Czochralski Silicon

Ulyashin, A. G., Bumay, Yu. A., Fahrner, W. R., Ivanov, A. I., Job, R., Palmetshofer, L.

MRS - Materials Research Society
5 Conference Proceedings Morphology and Stress Investigations of Surface and Subsurface Regions of Plasma Hydrogenated and Annealed Czochralski Silicon

Job, R., Ma, Y., Huang, Y.L., Diingen, W.

Electrochemical Society
11 Conference Proceedings Comparison of Oxygen and Hydrogen Gettering at High-Temperature Postimplantation Annealing of Hydrogen- and Helium-Implanted Czochralski Silicon

Job, R., Fahrner, W. R., Ivanov, A. I., Palmetshofer, L., Ulyashin, A. G.

MRS - Materials Research Society
6 Conference Proceedings From Smart-Cut to Soft-Cut: Mechanisms of Hydrogen Plasma Supported Layer Exfoliation in Silicon

R. Job, W. Düngen, Y. Ma, J. T. Horstmann

Electrochemical Society
12 Conference Proceedings Comparative Raman And Tem Analysis Of The Evolution Of Platelet Defects In Plasma Hydrogenated And Annealed Czochralski Silicon

Job, R., Beaufort, M.-F., Barbot, J.-F., Ulyashin, A.G., Fahrner, W.R.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12