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Determination of Diffusivities of Si Self-Diffusion and Si Self-Interstitials using Isotopically Enriched Single- or Multi-30Si Epitaxial Layers

Author(s):
Matsumoto, S.
Aid, S.R.
Sakaguchi, T.
Toyonaga, K.
Nakabayashi, Y.
Sakuraba, M.
Shimamune, Y.
Hashiba, Y.
Murota, J.
Wada, K.
Abe, T.
6 more
Publication title:
Semiconductor defect engineering - materials, synthetic structures and devices : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
864
Pub. date:
2005
Page(from):
425
Page(to):
436
Pages:
12
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558998179 [1558998179]
Language:
English
Call no.:
M23500/864
Type:
Conference Proceedings

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