Blank Cover Image

Stress Generation in PECVD silicon Nitride Thin Films for Microelectronics Applications

Author(s):
Belyansky, M.
Klymko, N.
Madan, A.
Mallikarjunan, A.
Li, Y.
Chakravarti, A.
Deshpande, S.
Domenicucci, A.
Bedell, S.
Adams, E.
Coffin, J.
Tai, L.
Sun, S-P.
Widodo, J.
Lai, C-W.
10 more
Publication title:
Materials, technology and reliability of advanced interconnects - 2005 : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
863
Pub. Year:
2005
Page(from):
97
Page(to):
102
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558998162 [1558998160]
Language:
English
Call no.:
M23500/863
Type:
Conference Proceedings

Similar Items:

Belyansky, M., Klymko, N., Madan, A., Mallikarjunan, A., Li, Y., Chakravarti, A., Deshpande, S., Domenicucci, A., …

Materials Research Society

M. Balseanu, L. Q. Xia, V. Zubkov, M. Le, J. Lee, H. M'Saad

Electrochemical Society

Martyniuk, M.P., Antoszewski, J., Musca, C.A., Dell, J.M., Faraone, L.

SPIE - The International Society of Optical Engineering

Deshpande, Sadanand V., Gulari, Erdogan, Brown, Steven W., Rand, S. C.

MRS - Materials Research Society

Madan,Arun

SPIE - The International Society for Optical Engineering

Morrison, Scott, Xi, Jianping, Madan, Arun

MRS - Materials Research Society

Zhang, X., Zhao, Y., Zhu, F., Mai, Y., Wei, C., Gao, Y., Hou, G., Sun, J., Li, J., Geng, X., Xiong, S.

SPIE - The International Society of Optical Engineering

Savall, C., Bustarret, E., Stoquert, J.P., Bruyere, J.C.

Materials Research Society

Yu, Y., Luo, Z., Weng, X.

SPIE - The International Society of Optical Engineering

Yu, S., Deshpande, S., Gulari, E., Kanicki, J.

MRS - Materials Research Society

Cianci, E., Foglietti, V.

Materials Research Society

Lai, Y.-S., Chen, J.-S

Electrochemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12