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Threshold Voltage Optimization with Ion Shower Implantation for Polysilicon Thin-Film Transistors

Author(s):
Choi, B.D.
Choi, D.C.
Im, C.Y.
Choi, K.H.
Yu, C.H.
Kakkad, R.
Chung, H.K.
2 more
Publication title:
Amorphous and nanocrystalline silicon science and technology - 2005 : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
862
Pub. Year:
2005
Page(from):
653
Page(to):
658
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558998155 [1558998152]
Language:
English
Call no.:
M23500/862
Type:
Conference Proceedings

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