Blank Cover Image

200mm Silicon Wafer-to-Wafer Bonding with Thin Ti Layer under BEOL-Compatible Process Conditions

Author(s):
Publication title:
Surface engineering 2004 - fundamentals and applications : symposium held November 30-December 2, 2004, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
843
Pub. date:
2005
Page(from):
305
Page(to):
310
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558997912 [1558997911]
Language:
English
Call no.:
M23500/843
Type:
Conference Proceedings

Similar Items:

Kwon, Y., Yu, J., McMahon, J.J., Lu, J.-Q., Cale, T.S., Gutmann, R.J.

Materials Research Society

McMahon, J.J., Kwon, Y., Lu, J.-Q., Cale, T.S., Gutmann, R.J.

Materials Research Society

Kwon, Y., Jindal, A., McMahon, J.J., Cale, T.S., Gutmann, R.J., Lu, J-Q.

Electrochemical Society

Jindal, A., Lu, J. -Q., Kwon, Y., Rajagopalan, G., McMahon, J. J., Zeng, A. Y., Flesher, H. K., Cale, T. S., Gutmann, R. …

Materials Research Society

Niklaus, F., Kumar, R.J., McMahon, J.J., Yu, J., Matthias, T., Wimplinger, M., Lindner, P., Lu, J.-Q., Cale, T.S., …

Materials Research Society

Lee, Sang Hwui, Niklaus, Frank, McMahon, J. Jay, Yu, Jian, Kumar, Ravi J., Li, Hui-feng, Gutmann, Ronald J., Cale, …

Materials Research Society

Lu, J.-Q., Kwon, Y., Jindal, A., McMahon, J.J., Cale, T.S., Gutmann, R.J.

Electrochemical Society

Yu, Jian, Wang, Yinmin, Haberl, Arthur W., Bakhru, Hassa, Lu, Jian-Qiang, Gutmann, Ronald J.

Materials Research Society

Yu, J., Wang, Y.M., Lu, J.-Q., Gutmann, R.J.

Electrochemical Society

Yu, Jian, Moore, Richard L., Lee, Sang Hwui, McMahon, J. Jay, Lu, Jian-Qiang, Gutmann, Ronald J.

Materials Research Society

6 Conference Proceedings Dielectric Glue Wafer Bonding for 3D ICs

Kwon, Y., Jindal, A., McMahon, J. J., Lu, J. -Q., Gutmann, R. J., Cale, T. S.

Materials Research Society

Kwon, Y., Lu, J.-Q., Kraft, R.P., McDonald, J.F., Gutmann, R.J., Cale, T.S.

Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12