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Nanoindentation of Ion Implanted and Deposited Amorphous Silicon

Author(s):
Publication title:
Surface engineering 2004 - fundamentals and applications : symposium held November 30-December 2, 2004, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
843
Pub. Year:
2005
Page(from):
259
Page(to):
264
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558997912 [1558997911]
Language:
English
Call no.:
M23500/843
Type:
Conference Proceedings

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