Blank Cover Image

Control of Stress in Surface Engineered Silicon

Author(s):
Ma, Y.
Job, R.
Zolgert, B.
Dungen, W.
Huang, Y. L.
Fahrner, W. R.
1 more
Publication title:
Surface engineering 2004 - fundamentals and applications : symposium held November 30-December 2, 2004, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
843
Pub. Year:
2005
Page(from):
99
Page(to):
104
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558997912 [1558997911]
Language:
English
Call no.:
M23500/843
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings On the Formation Kinetics of Thin Nanopatterned Layers on Silicon Wafers Created by Hydrogen Plasma Exposure

Job, R., Huang, Y. L., Ma, Y., Zolgert, B., Dungen, W.

Materials Research Society
7 Conference Proceedings Morphology and Stress Investigations of Surface and Subsurface Regions of Plasma Hydrogenated and Annealed Czochralski Silicon

Job, R., Ma, Y., Huang, Y.L., Diingen, W.

Electrochemical Society
2 Conference Proceedings Micro-Raman Analysis of Hydrogen Related Defects in Czochralski Silicon (Invited)

Job, R., Dungen, W., Ma, Y., Huang, Y. L.

Electrochemical Society
8 Conference Proceedings Thermal Evolution of Hydrogen Related Defects in Silicon Investigated by u-Raman Spectroscopy

Ma, Y., Huang, Y.L., Job, R., Fahrner, W.R., Beaufort, M.-F., Barbot, J. -F.

Electrochemical Society
3 Conference Proceedings μ-Raman Spectra Analysis of the Evolution of Hydrogen Related Defects and Void Formation in the Silicon Ion-Cut Process

Dungen, W., Job, R., Ma, Y., Huang, Y.L., Fahrner, W.R., Keller, L.O., Horstmann, J.T.

Materials Research Society
9 Conference Proceedings From Smart-Cut to Soft-Cut: Mechanisms of Hydrogen Plasma Supported Layer Exfoliation in Silicon

R. Job, W. Düngen, Y. Ma, J. T. Horstmann

Electrochemical Society
4 Conference Proceedings P-N Junction Diodes Fabricated Based on Donor Formation in Plasma Hydrogenated P-Type Czochralski Silicon

Huang, Y.L., Simoen, E., Job, R., Claeys, C., Dungen, W., Ma, Y., Fahrner, W.R., Versluys, J., Clauws, P.

Materials Research Society
10 Conference Proceedings Comparison of Oxygen and Hydrogen Gettering at High-Temperature Postimplantation Annealing of Hydrogen- and Helium-Implanted Czochralski Silicon

Job, R., Fahrner, W. R., Ivanov, A. I., Palmetshofer, L., Ulyashin, A. G.

MRS - Materials Research Society
5 Conference Proceedings Hydrogen Gettering and Platelet Formation in Implanted and Hydrogenated Silicon

A. Job, W. Düngen, Y. Ma, W. R. Fahrner, L. O. Keller, J. T. Horstmann, H. Fiedler

Electrochemical Society
11 Conference Proceedings Bulk and Surface Properties of Cz Silicon After Hydrogen Plasma

Job, R., Ulyashin, AG., Fahrner, W.R., Markevich, V.P., Murin, LI., LindstrtSm, J.L., Raiko, V., Engemann, J.

Electrochemical Society
6 Conference Proceedings Void Formation in Hydrogen Implanted and Subsequently Plasma Hydrogenated and Annealed Czochralski Silicon

Job, R., Dungen, W., Ma, Y., Huang, Y.L., Horstmann, J.T.

Materials Research Society
12 Conference Proceedings Hydrogen-plasma-enhanced thermal donor formation in n-type high-resistivity MCZ silicon

Simoen, E., Huang, Y. L., Claeys, C., Raft, J. M., Job, R., Fahrner, W. R., Versluys, J., Clauws, P.

Electrochemical Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12