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Nanoindentation of Ion Implanted and Deposited Amorphous Silicon

Author(s):
Publication title:
Fundamentals of nanoindentation and nanotribology III : symposium held November 29-December 3, 2004, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
841
Pub. Year:
2005
Page(from):
273
Page(to):
278
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558997899 [155899789X]
Language:
English
Call no.:
M23500/841
Type:
Conference Proceedings

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