MIM Capacitor Using ALD Al2O3 for RF IC and DRAM applications
- Author(s):
Ko, Sung Yong Oh, Jung Ik Choi, Joung Cheul Lee, Kang Hee Bae, Young Ho Jung, Young Chul Lee, Yong Hyun - Publication title:
- Materials, integration and packaging issues for high-frequency devices
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 833
- Pub. Year:
- 2004
- Page(from):
- 111
- Page(to):
- 116
- Pages:
- 6
- Pub. info.:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558997813 [1558997814]
- Language:
- English
- Call no.:
- M23500/833
- Type:
- Conference Proceedings
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