Dopant Activation in Bulk Germanium and Germanium-on-Insulator
- Author(s):
- Publication title:
- Progress in compound semiconductor materials -- electronic and optoelectronic applications
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 829
- Pub. Year:
- 2004
- Page(from):
- 423
- Page(to):
- 428
- Pages:
- 6
- Pub. info.:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558997776 [1558997776]
- Language:
- English
- Call no.:
- M23500/829
- Type:
- Conference Proceedings
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