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Vapor Phase Transport of AlN in an RF Heated Reactor: Low and High Temperature Studies

Author(s):
Noveski, V.
Schlesser, R.
Freitas, J.Jr.
Mahajan, S.
Beaudoin, S.
Sitar, Z.
1 more
Publication title:
GaN and related alloys - 2003 : symposium held December 1-5, 2003, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
798
Pub. date:
2004
Page(from):
281
Page(to):
286
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558997363 [1558997369]
Language:
English
Call no.:
M23500/798
Type:
Conference Proceedings

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