Young's Modulus, Poisson's Ratio, and Nanoscale Deformation Fields of MEMS Materials
- Author(s):
- Publication title:
- Thin films : stresses and mechanical properties X : symposium held December 1-5, 2003, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 795
- Pub. Year:
- 2002
- Page(from):
- 461
- Page(to):
- 466
- Pages:
- 6
- Pub. info.:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558997332 [1558997334]
- Language:
- English
- Call no.:
- M23500/795
- Type:
- Conference Proceedings
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