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Gas Cluster Ion Beam Processing of GaSb and InSb Surfaces

Author(s):
Krishnaswami, K.
Vangala, S.R.
Krejca, B.
Allen, L.P.
Santeufemio, C.
Dauplaise, H.
Liu, X.
Whitten, J.
Ospina, M.
Sung, C.
Bliss, D.
Goodhue, W.D
7 more
Publication title:
Radiation effects and ion-beam processing of materials : symposium held December 1-5, 2003, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
792
Pub. Year:
2004
Page(from):
617
Page(to):
622
Pages:
6
Pub. info.:
Warrendale, PA: Materials Research Society
ISSN:
02729172
ISBN:
9781558997301 [155899730X]
Language:
English
Call no.:
M23500/792
Type:
Conference Proceedings

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