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Multi-Dot Floating-Gates In MOSFETs for Nonvolatile Memories -Their Ion Beam Synthesis and Morphology

Author(s):
Muller, T.
Heinig, K.-H.
Bonafos, C.
Coffin, H.
Cherkashin, N.
Assayag, G. Ben
Schamm, S.
Zanchi, G.
Claverie, A.
Tence, M.
Colliex, C.
6 more
Publication title:
Radiation effects and ion-beam processing of materials : symposium held December 1-5, 2003, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
792
Pub. Year:
2004
Page(from):
333
Page(to):
338
Pages:
6
Pub. info.:
Warrendale, PA: Materials Research Society
ISSN:
02729172
ISBN:
9781558997301 [155899730X]
Language:
English
Call no.:
M23500/792
Type:
Conference Proceedings

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