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Influence of Hydrogen Plasma Treatment on He Implantation-Induced Nanocavities in Silicon

Author(s):
Vengurlekar, A.
Ashok, S.
Liu, C.L.
Ntsoenzok, E.
Barthe, M.F.
Desgardin, P.
Ruault, M.O.
2 more
Publication title:
Radiation effects and ion-beam processing of materials : symposium held December 1-5, 2003, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
792
Pub. Year:
2004
Page(from):
183
Page(to):
188
Pages:
6
Pub. info.:
Warrendale, PA: Materials Research Society
ISSN:
02729172
ISBN:
9781558997301 [155899730X]
Language:
English
Call no.:
M23500/792
Type:
Conference Proceedings

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