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A Robust Process for Ion Implant Annealing of SiC in a Low-Pressure Silane Ambient

Author(s):
Rao, S.
Saddow, S.E.
Bergamini, F.
Nipoti, R.
Emirov, Y.
Agrawal, Anant
1 more
Publication title:
Silicon carbide 2004--materials, processing and devices : symposium held April 14-15, 2004, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
815
Pub. date:
2004
Page(from):
229
Page(to):
234
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558997653 [1558997652]
Language:
English
Call no.:
M23500/815
Type:
Conference Proceedings

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