Growth and Metrology of Silicon Oxides on Silicon Carbide

Growth and Metrology of Silicon Oxides on Silicon Carbide

Author(s):: Hoff, Andrew M.
Publication title:: Silicon carbide 2004--materials, processing and devices : symposium held April 14-15, 2004, San Francisco, California, U.S.A.
Title of ser.:: Materials Research Society symposium proceedings
Ser. no.:: 815
Pub. Year:: 2004
Page(from):: 189
Page(to):: 198
Pages:: 10
Pub. info.:: Warrendale, Pa.: Materials Research Society
ISSN:: 02729172
ISBN:: 9781558997653 [1558997652]
Language:: English
Call no.:: M23500/815
Type:: Conference Proceedings

Details

TDL ID:	ZA00014457
Series ID:	PA00000011
Conf. info. (Name):	Symposium on Silicon carbide
Conf. info. (Number):	2004
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	2004.04.14-2004.04.15

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