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Growth of Large Diameter Semi-Insulating 6H-SiC Crystals by Physical Vapor Transport

Author(s):
Yoganathan, M.
Gupta, A.
Semenas, E.
Emorhokpor, E.
Martin, C.
Kerr, T.
Zwieback, I.
Souzis, A.E.
Anderson, T.A.
Tanner, C.D.
Chen, J.
Barrett, D.L.
Hopkins, R.H.
Johnson, C.J.
Yan, Fei
Choyke, W.J.
Devaty, R.P.
12 more
Publication title:
Silicon carbide 2004--materials, processing and devices : symposium held April 14-15, 2004, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
815
Pub. date:
2004
Page(from):
21
Page(to):
26
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558997653 [1558997652]
Language:
English
Call no.:
M23500/815
Type:
Conference Proceedings

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