Hydrogen in Silicon and Germanium : Impurity Activation and Dopant Passivation
- Author(s):
- Haller, E.E.
- Publication title:
- Hydrogen in semiconductors : symposium held April 13-14, 2004, San Francisco, California, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 813
- Pub. Year:
- 2004
- Page(from):
- 3
- Page(to):
- 14
- Pages:
- 12
- Pub. info.:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558997639 [1558997636]
- Language:
- English
- Call no.:
- M23500/813
- Type:
- Conference Proceedings
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