Supercritical CO2 Treatments for Semiconductor Applications

Supercritical CO2 Treatments for Semiconductor Applications

Author(s):

Gangopadhyay, S.

Publication title:

Materials, technology and reliability for advanced interconnects and low-k dielectrics - 2004 : symposium held April 13-15, 2004, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

812

Pub. Year:

2004

Page(from):

37

Page(to):

42

Pages:

6

Pub. info.:

Warrendale: Materials Research Society

ISSN:

02729172

ISBN:

9781558997622 [1558997628]

Language:

English

Call no.:

M23500/812

Type:

Conference Proceedings

Details

TDL ID:	ZA00014454
Series ID:	PA00000011
Conf. info. (Name):	Symposium on materials, technology and reliability for advanced interconnects and low-k dielectrics
Conf. info. (Number):	2004
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	2004.04.13-2004.04.15

Similar Items:

1 Conference Proceedings Creating Nanoporosity by Selective Extraction of Porogens Using Supercritical Carbon Dioxide/Cosolvent Processes Lahlouh, B., Rajagopalan, T., Lubguban, J. A., Biswas, N., Gangopadhyay, S., Sun, J., Huang, D., Simon, S. L., Kim, H. … Materials Research Society	7 Conference Proceedings Polyimide Nanofoams from Phase Separated Triblock Copolymers Miller D. R., Hsu -L. B., Carter R. K., Cha J. H., Hawker J. C., Hedrick L. J., Di Pietro A. R., Labadie W. J., Russell … Kluwer Academic Publishers
2 Conference Proceedings Nanoporous, Low-Dielectric Constant Organosilicate Materials Derived from Inorganic Polymer Blends Miller, R.D., Volksen, W., Lee, V.Y., Conner, E., Magbitang, T., Zafran, R., Sundberg, L., Hawker, C.J., Hedrick, J.L., … American Chemical Society	8 Conference Proceedings A study on the SO₂ reduction by CO over SnO₂−ZrO₂ catalysts G.B. Han, J.H. Jun, N.K. Park, J.D. Lee, C.H. Park, S.O. Ryu, T.J. Lee Elsevier
3 Conference Proceedings High-Temperature Nonlinear Polyimides for x(2) Applications Miller, R. D., Burland, D. M., Jurich, M., Lee, V. Y., Moylan, C. R., Twieg, R. J., Thackara, J., Verbiest, T., Volksen, … American Chemical Society	9 Conference Proceedings Results from ERS-1 radar altimetry ground truthing on the Filchner-Ronne-Schelfeis SCHENKE, H. W., HEIDLAND, K., SEEBER, G., VOLKSEN, C. ESA Publications Division
4 Conference Proceedings Current and Potential Uses of Positron Beams to Study Porosity in Low-k Dielectric Thin Films Rodbell, K.P., Petkov, M.P., Weber, M.H., Lynn, K.G., Volksen, W., Miller, R.D. Trans Tech Publications	10 Conference Proceedings ENVIRONMENTAL APPLICATIONS OF XANES: SPECIATION OF Tc IN CEMENT AFTER CHEMICAL TREATMENT AND Se AFTER BACTERIAL UPTAKE Shuh, D. K., Kaltsoyannis, N., Bucher, J. J., Edelstein, N. M., Clark, S. B., Nitsche, H., Almahamid, I., Torretto, P., … MRS - Materials Research Society
5 Conference Proceedings Block and random copolymer resists designed for 193-nm lithography and environmentally friendly supercritical CO2 development Gabor,A.H., Allen,R.D., Gallagher-Wetmore,P.M., Ober,C.K. SPIE-The International Society for Optical Engineering	11 Conference Proceedings Development and Characterization of a PECVD Silicon Nitride for Damascene Applications Lee, A.S., Le, N.Rajagopalan.M., Kim, B.K., Saad, H.M. Electrochemical Society
6 Conference Proceedings Enhanced Dielectric Constant of HfO₂ and Al₂O₃ Thin-Films with Silver Nanoparticles K. Ravindran, M. Othman, M. Yun, N. Biswas, N. Mehta, S. Guha, K. Gangopadhyay, S. Gangopadhyay Electrochemical Society	12 Conference Proceedings Synthesis of dimethyl carbonate from CH3OH and CO2 with Ce1-xZrxO2 catalysts Han, G. B., Park, N. K., Jun, J. H., Chang, W. C., Lee, B. G., Ahn, B. S., Ryu, S. O., Lee, T. J. Elsevier

1

2

3

4

5

6

7

8

9

10

11

12