Fin Sidewall Microroughness Measurement by AFM

Fin Sidewall Microroughness Measurement by AFM

Author(s):

Gondran, Carolyn F.H.

Balasubramanian, Sriram

King, Tsu-Jae

3 more

Publication title:

Integration of advanced micro- and nanoelectronic devices - critical issues and solutions : symposium held April 13-16, 2004, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

811

Pub. Year:

2004

Page(from):

365

Page(to):

372

Pages:

8

Pub. info.:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558997615 [155899761X]

Language:

English

Call no.:

M23500/811

Type:

Conference Proceedings

Details

TDL ID:	ZA00014453
Series ID:	PA00000011
Conf. info. (Name):	Symposium on integration of advanced micro- and nanoelectronic devices
Conf. info. (Number):	2004
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	2004.04.13-2004.04.16

Similar Items:

1 Conference Proceedings Effects of Hydrogen Annealing Process Conditions on Nano Scale Silicon (011) Fins Zaman, Rownak J., Xiong, Weize, Quintanilla, Rudy, Schulz, Thomas, Cleavelin, C. Rinn, Wise, Rick, Pas, Mike, Patruno, … Materials Research Society	7 Conference Proceedings Reference metrology using a next-generation CD-AFM Dixson, R., Guerry, A. SPIE - The International Society of Optical Engineering
2 Conference Proceedings Implementation of Reference Measurement System using CD-AFM Dixson, R.G., Guerry, A., Bennett, M.H., Vorburger, T.V., Bunday, B.D. SPIE-The International Society for Optical Engineering	8 Conference Proceedings Grain Boundaries of Finite Length King,A.H., Balasubramanian,L. Trans Tech Publications
3 Conference Proceedings Process Optimization and Integration of HfO2 and Hf-Silicates Takeuchi, Hideki, King, Tsu-Jae Materials Research Society	9 Conference Proceedings Properties of Ultra-Thin Thermal Silicon Nitride Buchheit, Katherine M., Takeuchi, Hideki, King, Tsu-Jae Materials Research Society
4 Conference Proceedings Measurement of a CD and sidewall angle artifact with two-dimensional CD AFM metrology Dixson,R., Sullivan,N.T., Schneir,J., McWaid,T.H., Tsai,V.W., Prochazka,J.J., Young,M. SPIE-The International Society for Optical Engineering	10 Conference Proceedings Optimization of Poly-SiGe Deposition Processes for Modular MEMS Integration Lin, Blake C. -Y., King, Tsu-Jae, Howe, Roger T. Materials Research Society
5 Conference Proceedings Low-Temperature LPCVD MEMS Technologies Howe, Roger T., King, Tsu-Jae Materials Research Society	11 Conference Proceedings Dual Work Function CMOS Gate Technology Based on Metal Interdiffusion Polishchuk, Igor, Ranade, Pushkar, King, Tsu-Jae, Hu, Chenming Materials Research Society
6 Conference Proceedings CRYSTALLITE ROTATION EXPERIMENTS REVISITED: THE CONTRIBUTION OF FREE-SURFACE INTERACTIONS Balasubramanian, L., King, A. H. MRS - Materials Research Society	12 Conference Proceedings Study of Germanium Epitaxial Recrystallization on Bulk-Si Substrates Byron Ho, Reinaldo Vega, Tsu-Jae King-Liu Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12