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Fundamental Study and Oxide Reliability of the MBE-Grown Ga2-xGdxO3 Dielectric Oxide for Compound Semiconductor MOSFETs

Author(s):
Kwo, J.
Hong, M.
Mannaerts, J.P.
Lee, Y.J.
Wu, Y.D.
Lee, W.G.
Milkap, S.
Yang, B.
Gustaffson, T.
4 more
Publication title:
Integration of advanced micro- and nanoelectronic devices - critical issues and solutions : symposium held April 13-16, 2004, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
811
Pub. Year:
2004
Page(from):
359
Page(to):
364
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558997615 [155899761X]
Language:
English
Call no.:
M23500/811
Type:
Conference Proceedings

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