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Structure of Sc2O3 Films Epitaxially Grown on a-Al2O3 (111)

Author(s):
Kortan, A.R.
Hong, M.
Kwo, J.
Chang, P.
Chen, C.P.
Mannaerts, J.P.
Liou, S.H.
2 more
Publication title:
Integration of advanced micro- and nanoelectronic devices - critical issues and solutions : symposium held April 13-16, 2004, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
811
Pub. Year:
2004
Page(from):
329
Page(to):
334
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558997615 [155899761X]
Language:
English
Call no.:
M23500/811
Type:
Conference Proceedings

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