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Crystallization Behavior of Hf-Rich Aluminates and Influence on Film Dielectric Properties

Author(s):
Climent, M.
Crivelli, B.
Righini, G.
Alberici, S.
Alessandri, M.
Elbaz, A.C.
Pavia, G.
Wiemer, C.
3 more
Publication title:
Integration of advanced micro- and nanoelectronic devices - critical issues and solutions : symposium held April 13-16, 2004, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
811
Pub. date:
2004
Page(from):
313
Page(to):
318
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558997615 [155899761X]
Language:
English
Call no.:
M23500/811
Type:
Conference Proceedings

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