Reduction of CV Hysteresis in Metal/High-k MISFETs Using Flash Lamp Post Deposition Annealing
- Author(s):
Matsuki, Takeo Akasaka, Yasushi Hayashi, Kiyoshi Noguchi, Masataka Yamashita, Koji Syoji, Hideyuki Torii, Kazuyoshi Kasai, Naoki Arikado, Tsunetoshi - Publication title:
- Integration of advanced micro- and nanoelectronic devices - critical issues and solutions : symposium held April 13-16, 2004, San Francisco, California, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 811
- Pub. Year:
- 2004
- Page(from):
- 87
- Page(to):
- 92
- Pages:
- 6
- Pub. info.:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558997615 [155899761X]
- Language:
- English
- Call no.:
- M23500/811
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Nitrided Hafnium Silicate Film Formation by Sequential Process Using a Hot Wall Batch System and Its Application to MOS Transistor
Materials Research Society |
American Society of Mechanical Engineers |
Electrochemical Society |
8
Conference Proceedings
Feasibility Study on Nitrogen-15 Enrichment and Recycling System for Innovative FR Cycle System With Nitride Fuel
American Society of Mechanical Engineers |
3
Conference Proceedings
ADVANCED EXCIMER LASER ANNEALING OF THIN POLY Si FILMS AFTER SOLID PHASE GRAIN GROWTH
Materials Research Society |
SPIE-The International Society for Optical Engineering |
Materials Research Society |
10
Conference Proceedings
Thermally Induced Deformation and Stresses During Millisecond Flash Lamp Annealing
Materials Research Society |
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
12
Conference Proceedings
Advanced Thermal Processing of Semiconductor Materials by Flash Lamp Annealing
Materials Research Society |