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Non-Contact Electrical Measurements of Sheet Resistance and Leakage Current Density for Ultra-Shallow (and Other) Junctions

Author(s):
Faifer, Vladimir N.
Current, Michael I.
Walecki, Wojtek
Soucnkov, Vitali
Mikhaylov, Georgy
Van, Phuc
Wong, Tim
Nguyen, Tan
Lu, Jiansong
Lau, S.H.
Koo, Ann
6 more
Publication title:
Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
810
Pub. Year:
2004
Page(from):
475
Page(to):
480
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558997608 [1558997601]
Language:
English
Call no.:
M23500/810
Type:
Conference Proceedings

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