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Study of Ge Out-Diffusion During Nickel (Platinum 〜 0, 5, 10 at.%) Germanosilicide Formation

Author(s):
Jin, L.J.
Pey, K.L.
Choi, W.K.
Fitzgerald, E.A.
Antoniadis, D.A.
Pitera, A.J.
Lee, M.L.
Chi, D.Z.
3 more
Publication title:
Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
810
Pub. Year:
2004
Page(from):
141
Page(to):
146
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558997608 [1558997601]
Language:
English
Call no.:
M23500/810
Type:
Conference Proceedings

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