Germanium-on-Insulator (GeOI) Structure Realized by the Smart CutTM Technology

Germanium-on-Insulator (GeOI) Structure Realized by the Smart CutTM Technology

Author(s):

Publication title:

High-mobility group-IV materials and devices : symposium held April 13-15, 2004, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

809

Pub. Year:

2004

Page(from):

153

Page(to):

160

Pages:

8

Pub. info.:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558997592 [1558997598]

Language:

English

Call no.:

M23500/809

Type:

Conference Proceedings

Details

TDL ID:	ZA00014451
Series ID:	PA00000011
Conf. info. (Name):	Symposium on high-mobility group
Conf. info. (Number):	4th
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	2004.04.13-2004.04.15

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